Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

Kah How Koh; Takeshi Kobayashi; Huicong Liu; Chengkuo Lee

doi:10.1016/j.proeng.2011.12.173

Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

Kah How Koh
, Takeshi Kobayashi
, Huicong Liu
, Chengkuo Lee^*

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V _pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

Original language	English
Pages (from-to)	701-704
Number of pages	4
Journal	Procedia Engineering
Volume	25
DOIs	https://doi.org/10.1016/j.proeng.2011.12.173
State	Published - 2011
Externally published	Yes
Event	25th Eurosensors Conference - Athens, Greece Duration: 4 Sep 2011 → 7 Sep 2011

Keywords

Micro-electro-mechanical systems (MEMS)
Optical MEMS
PZT
Piezoelectric actuator

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10.1016/j.proeng.2011.12.173

Cite this

@article{c279f4b92d934d4aad0d8a4930625afc,

title = "Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator",

abstract = "A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.",

keywords = "Micro-electro-mechanical systems (MEMS), Optical MEMS, PZT, Piezoelectric actuator",

author = "Koh, \{Kah How\} and Takeshi Kobayashi and Huicong Liu and Chengkuo Lee",

year = "2011",

doi = "10.1016/j.proeng.2011.12.173",

language = "英语",

volume = "25",

pages = "701--704",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier Ltd",

note = "25th Eurosensors Conference ; Conference date: 04-09-2011 Through 07-09-2011",

}

TY - JOUR

T1 - Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

AU - Koh, Kah How

AU - Kobayashi, Takeshi

AU - Liu, Huicong

AU - Lee, Chengkuo

PY - 2011

Y1 - 2011

N2 - A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

AB - A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

KW - Micro-electro-mechanical systems (MEMS)

KW - Optical MEMS

KW - PZT

KW - Piezoelectric actuator

UR - https://www.scopus.com/pages/publications/84863164112

U2 - 10.1016/j.proeng.2011.12.173

DO - 10.1016/j.proeng.2011.12.173

M3 - 会议文章

AN - SCOPUS:84863164112

SN - 1877-7058

VL - 25

SP - 701

EP - 704

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 25th Eurosensors Conference

Y2 - 4 September 2011 through 7 September 2011

ER -

Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

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Keywords

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