Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers

This paper presents the design, microfabrication, modeling and characterization of a piezoelectric energy harvester (PEH) system with a wide operating bandwidth introduced by mechanical stoppers. The wideband frequency responses of the PEH system with stoppers on one side and two sides are investigated thoroughly. The experimental results show that the operating bandwidth is broadened to 18Hz (3048Hz) and the corresponding optimal power ranges from 34 to 100nW at the base acceleration of 0.6g and under top-and bottom-stopper distances of 0.75mm and 1.1mm, respectively. By adjusting the mechanical stopper distance, the output power and frequency bandwidth can be optimized accordingly.