Influence of nitrogen flow rate on the solar spectrum absorbing properties of titanium nitride films prepared by magnetron sputtering

Xuan Wang; Guobo Dong; Min Zhang; Fangyuan Gao; Dunzhi Zhu; Xungang Diao

Influence of nitrogen flow rate on the solar spectrum absorbing properties of titanium nitride films prepared by magnetron sputtering

Xuan Wang
, Guobo Dong^*
, Min Zhang
, Fangyuan Gao
, Dunzhi Zhu
, Xungang Diao

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Titanium nitride (Ti-N) thin films were deposited by unbalanced magnetron sputtering under conditions of various N₂ flow rates at room temperature. The morphologies and optical properties of the films were studied. Four layers of solar selective absorbing coatings based on Ti-N were designed and then optimized by optical design software of SCOUT. Results show that various characteristics such as bubble precipitates, bubble bursting, and amorphous morphologies are observed in the films with the increasing of N₂ flow rate. The UV-Visible-NIF spectra show that the optical properties of the films can be improved using appropriate sputtering parameters and software optimization. Absorptance of the optimized films is enhanced from 0.8209 to 0.9048 after optimization, which are suitable as solar selective absorbing coatings.

Original language	English
Pages (from-to)	2242-2246
Number of pages	5
Journal	Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Volume	43
Issue number	9
State	Published - 1 Sep 2014

Keywords

Magnetron sputtering
Optimization
Room temperature
Selective absorbing coating
Titanium nitride

Cite this

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title = "Influence of nitrogen flow rate on the solar spectrum absorbing properties of titanium nitride films prepared by magnetron sputtering",

abstract = "Titanium nitride (Ti-N) thin films were deposited by unbalanced magnetron sputtering under conditions of various N2 flow rates at room temperature. The morphologies and optical properties of the films were studied. Four layers of solar selective absorbing coatings based on Ti-N were designed and then optimized by optical design software of SCOUT. Results show that various characteristics such as bubble precipitates, bubble bursting, and amorphous morphologies are observed in the films with the increasing of N2 flow rate. The UV-Visible-NIF spectra show that the optical properties of the films can be improved using appropriate sputtering parameters and software optimization. Absorptance of the optimized films is enhanced from 0.8209 to 0.9048 after optimization, which are suitable as solar selective absorbing coatings.",

keywords = "Magnetron sputtering, Optimization, Room temperature, Selective absorbing coating, Titanium nitride",

author = "Xuan Wang and Guobo Dong and Min Zhang and Fangyuan Gao and Dunzhi Zhu and Xungang Diao",

year = "2014",

month = sep,

day = "1",

language = "英语",

volume = "43",

pages = "2242--2246",

journal = "Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering",

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number = "9",

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TY - JOUR

T1 - Influence of nitrogen flow rate on the solar spectrum absorbing properties of titanium nitride films prepared by magnetron sputtering

AU - Wang, Xuan

AU - Dong, Guobo

AU - Zhang, Min

AU - Gao, Fangyuan

AU - Zhu, Dunzhi

AU - Diao, Xungang

PY - 2014/9/1

Y1 - 2014/9/1

N2 - Titanium nitride (Ti-N) thin films were deposited by unbalanced magnetron sputtering under conditions of various N2 flow rates at room temperature. The morphologies and optical properties of the films were studied. Four layers of solar selective absorbing coatings based on Ti-N were designed and then optimized by optical design software of SCOUT. Results show that various characteristics such as bubble precipitates, bubble bursting, and amorphous morphologies are observed in the films with the increasing of N2 flow rate. The UV-Visible-NIF spectra show that the optical properties of the films can be improved using appropriate sputtering parameters and software optimization. Absorptance of the optimized films is enhanced from 0.8209 to 0.9048 after optimization, which are suitable as solar selective absorbing coatings.

AB - Titanium nitride (Ti-N) thin films were deposited by unbalanced magnetron sputtering under conditions of various N2 flow rates at room temperature. The morphologies and optical properties of the films were studied. Four layers of solar selective absorbing coatings based on Ti-N were designed and then optimized by optical design software of SCOUT. Results show that various characteristics such as bubble precipitates, bubble bursting, and amorphous morphologies are observed in the films with the increasing of N2 flow rate. The UV-Visible-NIF spectra show that the optical properties of the films can be improved using appropriate sputtering parameters and software optimization. Absorptance of the optimized films is enhanced from 0.8209 to 0.9048 after optimization, which are suitable as solar selective absorbing coatings.

KW - Magnetron sputtering

KW - Optimization

KW - Room temperature

KW - Selective absorbing coating

KW - Titanium nitride

UR - https://www.scopus.com/pages/publications/84908060177

M3 - 文章

AN - SCOPUS:84908060177

SN - 1002-185X

VL - 43

SP - 2242

EP - 2246

JO - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

JF - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

IS - 9

ER -

Influence of nitrogen flow rate on the solar spectrum absorbing properties of titanium nitride films prepared by magnetron sputtering

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Keywords

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