Influence of ion energies on the surface morphology of carbon films

Liu Hena Li; J. Z. Tian; X. Cai; Q. L. Chen; M. Xu; Y. Q. Wu; Ricky K.Y. Fu; Paul K. Chu

doi:10.1016/j.surfcoat.2004.08.223

Influence of ion energies on the surface morphology of carbon films

Liu Hena Li^*
, J. Z. Tian
, X. Cai
, Q. L. Chen
, M. Xu
, Y. Q. Wu
, Ricky K.Y. Fu
, Paul K. Chu

^*Corresponding author for this work

School of Mechanical Engineering and Automation

Shanghai Jiao Tong University
Nanyang Technological University
Beihang University
City University of Hong Kong

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.

Original language	English
Pages (from-to)	241-245
Number of pages	5
Journal	Surface and Coatings Technology
Volume	196
Issue number	1-3 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.surfcoat.2004.08.223
State	Published - 22 Jun 2005

Keywords

Carbon films
Deposition
Plasma immersion ion implantation
Surface morphology
Vacuum arc deposition

Access to Document

10.1016/j.surfcoat.2004.08.223

Cite this

@article{d68d68d7f86f4298b13a806c5368ec7b,

title = "Influence of ion energies on the surface morphology of carbon films",

abstract = "Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.",

keywords = "Carbon films, Deposition, Plasma immersion ion implantation, Surface morphology, Vacuum arc deposition",

author = "Li, \{Liu Hena\} and Tian, \{J. Z.\} and X. Cai and Chen, \{Q. L.\} and M. Xu and Wu, \{Y. Q.\} and Fu, \{Ricky K.Y.\} and Chu, \{Paul K.\}",

year = "2005",

month = jun,

day = "22",

doi = "10.1016/j.surfcoat.2004.08.223",

language = "英语",

volume = "196",

pages = "241--245",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "1-3 SPEC. ISS.",

}

TY - JOUR

T1 - Influence of ion energies on the surface morphology of carbon films

AU - Li, Liu Hena

AU - Tian, J. Z.

AU - Cai, X.

AU - Chen, Q. L.

AU - Xu, M.

AU - Wu, Y. Q.

AU - Fu, Ricky K.Y.

AU - Chu, Paul K.

PY - 2005/6/22

Y1 - 2005/6/22

N2 - Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.

AB - Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.

KW - Carbon films

KW - Deposition

KW - Plasma immersion ion implantation

KW - Surface morphology

KW - Vacuum arc deposition

UR - https://www.scopus.com/pages/publications/18144397247

U2 - 10.1016/j.surfcoat.2004.08.223

DO - 10.1016/j.surfcoat.2004.08.223

M3 - 文章

AN - SCOPUS:18144397247

SN - 0257-8972

VL - 196

SP - 241

EP - 245

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1-3 SPEC. ISS.

ER -

Influence of ion energies on the surface morphology of carbon films

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this