Abstract
Amorphous carbon (a-C) films have many potential applications due to their good mechanical properties. However, poor adhesion on substrates such as tool steels limits its applications. In the present work, a-C films were deposited on W-implanted (20 kV, 3 × 1017 ions-cm- 2) steel substrates by means of plasma immersion ion implantation and deposition (PIII&D). Compared to the films deposited on untreated steel substrates, the films deposited on the W-implanted steel substrates exhibit improved hardness, surface morphology, and adhesion strength. The modified layer with graded mechanical properties not only provides a structural continuity from the substrate to the film but also acts as the interlayer to mitigate stress concentration under applied loads.
| Original language | English |
|---|---|
| Pages (from-to) | 952-957 |
| Number of pages | 6 |
| Journal | Diamond and Related Materials |
| Volume | 15 |
| Issue number | 4-8 |
| DOIs | |
| State | Published - Apr 2006 |
Keywords
- 321 stainless steel
- Adhesion strength
- DLC applications
- Nano-scratch
- Tungsten implantation
- a-C films
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