TY - GEN
T1 - Impact-Induced Frequency Up-Conversion Vibration Energy Harvester Based on Metal-Substrate Piezoelectric Thick Film
AU - Lin, Kaijun
AU - Huang, Manjuan
AU - Feng, Xiaowei
AU - Li, Zhenming
AU - Liu, Wei
AU - Liu, Huicong
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - This paper presents an impact-induced frequency up-conversion piezoelectric energy harvester (FUC-PEH) to improve low-frequency output performance. The FUC-PEH includes a high-frequency piezoelectric cantilever (HFPC) with resonant frequency of 210 Hz and a low-frequency S-shaped stainless-steel cantilever (LFSC) with resonant frequency of 30 Hz. The HFPC is manufactured using MEMS metal-substrate lead zirconate titanate (PZT) thick film technology. The peak open-circuit voltage of FUC-PEH reaches 54.6 V over a drive frequency range of 10 to 60 Hz, which is 80% higher than that of a single HFPC in resonant state. It is expected to replace primary batteries and used as the power source for wireless sensor nodes. In addition, the low-frequency I-shaped stainless-steel cantilever (LFC-I), II-shaped cantilever (LFC-II) and III-shaped cantilever (LFC-III) are fabricated to explore the influence of the stiffness of low-frequency cantilever, the size of proof mass and the gap distance on the output performance of FUC-PEH.
AB - This paper presents an impact-induced frequency up-conversion piezoelectric energy harvester (FUC-PEH) to improve low-frequency output performance. The FUC-PEH includes a high-frequency piezoelectric cantilever (HFPC) with resonant frequency of 210 Hz and a low-frequency S-shaped stainless-steel cantilever (LFSC) with resonant frequency of 30 Hz. The HFPC is manufactured using MEMS metal-substrate lead zirconate titanate (PZT) thick film technology. The peak open-circuit voltage of FUC-PEH reaches 54.6 V over a drive frequency range of 10 to 60 Hz, which is 80% higher than that of a single HFPC in resonant state. It is expected to replace primary batteries and used as the power source for wireless sensor nodes. In addition, the low-frequency I-shaped stainless-steel cantilever (LFC-I), II-shaped cantilever (LFC-II) and III-shaped cantilever (LFC-III) are fabricated to explore the influence of the stiffness of low-frequency cantilever, the size of proof mass and the gap distance on the output performance of FUC-PEH.
KW - Frequency up-conversion
KW - PZT thick film
KW - Vibration energy harvesting
UR - https://www.scopus.com/pages/publications/85216554250
U2 - 10.1109/PowerMEMS63147.2024.10814213
DO - 10.1109/PowerMEMS63147.2024.10814213
M3 - 会议稿件
AN - SCOPUS:85216554250
T3 - 2024 IEEE 23rd International Conference on Micro and Miniature Power Systems, Self-Powered Sensors and Energy Autonomous Devices, PowerMEMS 2024
SP - 119
EP - 122
BT - 2024 IEEE 23rd International Conference on Micro and Miniature Power Systems, Self-Powered Sensors and Energy Autonomous Devices, PowerMEMS 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 23rd IEEE International Conference on Micro and Miniature Power Systems, Self-Powered Sensors and Energy Autonomous Devices, PowerMEMS 2024
Y2 - 18 November 2024 through 21 November 2024
ER -