High sensitivity optical pressure sensor based on graphene/molybdenum disulfide composite film

In this paper, a high sensitivity optical pressure sensor based on a graphene/molybdenum disulfide (MoS₂) composite film is proposed. The sensor is composed of a polydimethylsiloxane (PDMS) pyramid structure, graphene/MoS₂ composite film, and lithium niobate waveguide. The pressure deforms the PDMS pyramid structure, which leads to the change of the refractive index of the graphene/MoS₂ composite film, and finally be detectable sensitively by the variation of the interference spectrum. Experiments have been carried out using our sensor prototype, and the sensitivity is up to 575.233 nm/kPa in the pressure range of 0 kPa–0.123 kPa, which is much higher than that of typical optical pressure sensors. This shows the advantages of high sensitivity optical pressure sensors based on the graphene/MoS₂ composite film, which is expected to be applied in highly sensitive pressure detection environments.