High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity

Dongyang Chen; Xinxin Liu; Yong Wang; Zhonggui Xu; Hongyun Lin; Huicong Liu; Jin Xie

doi:10.1109/MEMSYS.2018.8346750

High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity

Dongyang Chen
, Xinxin Liu
, Yong Wang
, Zhonggui Xu
, Hongyun Lin
, Huicong Liu
, Jin Xie^*

^*Corresponding author for this work

Zhejiang University
Soochow University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

In this work, we report a high performance MEMS electrometer based on a clamped-free semi-circular beams (CFCB) resonator with a new sensing scheme of vibration perturbation. The CFCB resonator vibrating at elastic mode aims to eliminate the nonlinearity that widely exists in traditional double-ended tuning forks (DETF) sensors and lower the temperature coefficient of frequency. The charge sensing scheme of vibration perturbation has been realized by using the electric charge induced attractive electrostatic force to perturb the vibration of elastic mode and lead to a frequency modulation, which shows a sensitivity higher than the axial strain modulation scheme of DETF over one order of magnitude.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1092-1095
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346750
State	Published - 24 Apr 2018
Externally published	Yes
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Access to Document

10.1109/MEMSYS.2018.8346750

Cite this

Chen, D., Liu, X., Wang, Y., Xu, Z., Lin, H., Liu, H., & Xie, J. (2018). High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 1092-1095). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346750

Chen, Dongyang ; Liu, Xinxin ; Wang, Yong et al. / High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1092-1095 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{078bf5ed3af1458a96844bdcc98f389d,

title = "High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity",

abstract = "In this work, we report a high performance MEMS electrometer based on a clamped-free semi-circular beams (CFCB) resonator with a new sensing scheme of vibration perturbation. The CFCB resonator vibrating at elastic mode aims to eliminate the nonlinearity that widely exists in traditional double-ended tuning forks (DETF) sensors and lower the temperature coefficient of frequency. The charge sensing scheme of vibration perturbation has been realized by using the electric charge induced attractive electrostatic force to perturb the vibration of elastic mode and lead to a frequency modulation, which shows a sensitivity higher than the axial strain modulation scheme of DETF over one order of magnitude.",

author = "Dongyang Chen and Xinxin Liu and Yong Wang and Zhonggui Xu and Hongyun Lin and Huicong Liu and Jin Xie",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346750",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1092--1095",

booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

address = "美国",

}

Chen, D, Liu, X, Wang, Y, Xu, Z, Lin, H, Liu, H & Xie, J 2018, High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 1092-1095, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346750

High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity. / Chen, Dongyang; Liu, Xinxin; Wang, Yong et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1092-1095 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Chen, Dongyang

AU - Liu, Xinxin

AU - Wang, Yong

AU - Xu, Zhonggui

AU - Lin, Hongyun

AU - Liu, Huicong

AU - Xie, Jin

PY - 2018/4/24

Y1 - 2018/4/24

N2 - In this work, we report a high performance MEMS electrometer based on a clamped-free semi-circular beams (CFCB) resonator with a new sensing scheme of vibration perturbation. The CFCB resonator vibrating at elastic mode aims to eliminate the nonlinearity that widely exists in traditional double-ended tuning forks (DETF) sensors and lower the temperature coefficient of frequency. The charge sensing scheme of vibration perturbation has been realized by using the electric charge induced attractive electrostatic force to perturb the vibration of elastic mode and lead to a frequency modulation, which shows a sensitivity higher than the axial strain modulation scheme of DETF over one order of magnitude.

AB - In this work, we report a high performance MEMS electrometer based on a clamped-free semi-circular beams (CFCB) resonator with a new sensing scheme of vibration perturbation. The CFCB resonator vibrating at elastic mode aims to eliminate the nonlinearity that widely exists in traditional double-ended tuning forks (DETF) sensors and lower the temperature coefficient of frequency. The charge sensing scheme of vibration perturbation has been realized by using the electric charge induced attractive electrostatic force to perturb the vibration of elastic mode and lead to a frequency modulation, which shows a sensitivity higher than the axial strain modulation scheme of DETF over one order of magnitude.

UR - https://www.scopus.com/pages/publications/85046994541

U2 - 10.1109/MEMSYS.2018.8346750

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M3 - 会议稿件

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

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ER -

Chen D, Liu X, Wang Y, Xu Z, Lin H, Liu H et al. High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1092-1095. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346750

High sensitivity micro electrometer based on clamped free curved beams resonator with weakened nonlinearity

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