High-performance silicon micromachined resonant gyroscope

A vibratory rate gyroscope based on resonant sensing of the Coriolis force was introduced. Its advantages include a quasi-digital FM (frequency modulation) output, high sensitivity, and flexible parameter design. As a whole, the structure includes proof masses, cantilevers, leverage mechanisms, double-ended tuning fork (DETF), driving and checking combs. The two masses structure and special designed leverage mechanisms can achieve decoupling. The design that masses were outside the DETF, the leverage mechanisms and two DETF can largely help improving the sensitivity of the structure. The modal analysis and harmonic analysis were carried out by ANSYS; formula calculation and parameter optimization were achieved by MATLAB. Verified from the simulation results, the sensitivity of the gyroscope is 75 mHz/(deg/sec). Moreover, the sensor can successfully realize decoupling.