@inproceedings{7fc9d41debbb45a4a479e5e3f31f67c5,
title = "High efficiency arrangement in comb-drive actuators",
abstract = "This paper presents a new comb-drive actuator arrangement that has a large displacement with low driving voltage and relatively small footprint. The new arrangements in the comb drivers can provide both pulling forces and pushing forces as compared to conventional drivers that only provide pulling forces, therefore additional displacements are achieved without increasing the driving voltage. This arrangement is verified numerically using FEM and the simulation results are consistent with the values derived from the mathematical model. The results show an obviously enhanced displacement and a compact layout.",
keywords = "Comb-drive actuator, High efficiency arrangement, MEMS, Micro XY-stage, Microactuators",
author = "Xing Chen and Lee, \{Dong Weon\} and Jun Ding",
year = "2007",
doi = "10.1117/12.782684",
language = "英语",
isbn = "9780819468819",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies",
note = "3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems ; Conference date: 08-07-2007 Through 12-07-2007",
}