Abstract
The electron beam-current density at a target greatly affects imaging intensity and contrast when using a low-energy nano-focus X-ray source. This paper proposes a new electron gun comprising a 10-keV nano-focus X-ray source with a single-pole magnetic lens to improve its effective brightness and beam-current density. After analyzing the effect of the electric field on the extended Schottky emission, we first optimized the anode with high effective brightness and a fine virtual spot with enough intensity for nano-focus X-ray imaging. High effective beam-current density was then obtained by optimizing the position, geometry and electrical supplies of the single-pole magnetic lens. The effective brightness of this electron gun is 1.70×108 A•cm−2•sr−1, and the nano-focus X-ray source has a spot size of 41 nm when its tube current is 2 μA. This electron gun achieves higher beam current density (1.6×105A•cm−2), and its collimated landing beam efficiently transports the beam current in the X-ray source.
| Original language | English |
|---|---|
| Pages (from-to) | 475-478 |
| Number of pages | 4 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |
| Volume | 940 |
| DOIs | |
| State | Published - 1 Oct 2019 |
Keywords
- Beam current density
- Electron gun
- X-ray source
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