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High accuracy quartz crystal dew point sensor based on double cooling and double sensitive electrode

  • Jing Nie
  • , Xiaofeng Meng
  • , Ning Li
  • , Yike Luo
  • , Jing Tian
  • , Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

For active temperature controlled quartz resonant dew point sensors, the combination of Peltier and quartz crystal resonators (QCR) is a key factor in the design of sensor structures. A structure in which the Peltier and the QCR are surface to surface combined with single-sided cooling has unstable vibration when environmental parameters continuously change. In order to achieve continuous and accurate dew point measurement in a dynamically changing atmosphere, this paper presents a new structure based on double cooling and double sensitive surfaces. The Peltier is flexibly connected to the QCR non-electrode region using elastic thermal materials. The designed sensor has a dew point measurement test in an environment where there is a continuous change of humidity and temperature. The results show that the relative error is less than 0.06°C when the cooling rate is 0.02°C/s, compared to MICHELL S4000.

Original languageEnglish
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781509010127
DOIs
StatePublished - 21 Dec 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Publication series

NameProceedings of IEEE Sensors
Volume2017-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom
CityGlasgow
Period30/10/171/11/17

Keywords

  • Dew point sensor
  • double cooling
  • double sensitive electrode
  • humidity measurement

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