Harmonic analysis for output current of one-port electrostatically excited and capacitively detected resonator

This paper presents a harmonic numerical analysis for the output current of the one-port electrostatically excited and capacitively detected resonator under the alternating excitation with and without bias. A dynamic model of the resonator including geometric nonlinearity and electrostatic nonlinearity is established. The amplitude-frequency characters of the output current are extracted by combining the dynamic analysis methods, the numerical methods and the fast Fourier transformation (FFT) of the numerical results. The results of harmonic analysis show that alternating excitation without bias is more suitable for the one-port electrostatically excited and capacitively detected resonator based on frequency separation method, and also provide basis for the amplitude selection of the exciting voltage, the geometric parameters design of the resonator and the design of the following electrocircuit.