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Geometric distortion correction for sinusoidally scanned atomic force microscopic images

  • Xiangrui Tian*
  • , Lijun Xu
  • , Xiaolu Li
  • , Guangyi Shang
  • , Junen Yao
  • *Corresponding author for this work
  • Beihang University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A method for correcting the geometric distortion of the images scanned sinusoidally by an atomic force microscope (AFM) was proposed. The generation mechanism of the geometric distortion in sinusoidally scanned AFM images was analyzed. Based on the relationship between the coordinates of uniformly scanned points and those of sinusoidally scanned points, a transformation formula was obtained for correcting the geometric distortion when the sampling frequency is a constant. By comparing the forward method with the backward method, a hybrid method for correcting the geometric distortion of the sinusoidally scanned images was proposed. This method takes advantages of both the forward method and the backward method, and was proven to be better than either of them. In addition, it is a universal approach to correct the geometric distortion of the images scanned in the sinusoidal mode.

Original languageEnglish
Title of host publication2010 IEEE International Conference on Imaging Systems and Techniques, IST 2010 - Proceedings
Pages398-402
Number of pages5
DOIs
StatePublished - 2010
Event2010 IEEE International Conference on Imaging Systems and Techniques, IST 2010 - Thessaloniki, Greece
Duration: 1 Jul 20102 Jul 2010

Publication series

Name2010 IEEE International Conference on Imaging Systems and Techniques, IST 2010 - Proceedings

Conference

Conference2010 IEEE International Conference on Imaging Systems and Techniques, IST 2010
Country/TerritoryGreece
CityThessaloniki
Period1/07/102/07/10

Keywords

  • Atomic force microscope (AFM)
  • Correction
  • Geometric distortion
  • Sinusoidal scanning

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