Fault diagnosis based on wavelet multi-resolution analysis for high performance XY-stage

Directing to the structure and dynamic characteristics of a high performance XY-stage driven by linear motors, this paper presented the fault diagnosis method based on wavelet multi-resolution combined with time-domain analysis for the stage. By studying the vibration signals in multi-position of the stage under multi-conditions, a method of squaring the wavelet decomposing modulus was adopted to settle the problem, that eliminates the interference of random noise existed in measured signals. Finally, based on foregoing results, combination with time-domain method can effectively distill the faulty signal characteristics. The experimental results indicate that the method is feasible.