@inbook{9bbd446f76ab4d5dba5bac30c8ed62a2,
title = "Fabrication Technique of Deformation Carriers (Gratings and Speckle Patterns) with FIB for Microscale/Nanoscale Deformation Measurement",
abstract = "The fabrication technique of deformation carriers with focused ion beam (FIB) milling for microscale/nanoscale deformation measurement has been studied in this chapter. The deformation carriers refer to microscale/nanoscale gratings and speckle patterns, which are indispensable elements for moir{\'e} and digital image correlation (DIC) method under scanning electron microscope (SEM) respectively. The fabrication principle, the design, and the influencing factors of these two kinds of deformation carriers are studied respectively. Their successful applications to microscale/nanoscale deformation measurement are also presented, which demonstrate that the deformation carriers combined with photo-mechanics techniques under SEM are effective tools for microscale/nanoscale deformation measurement.",
keywords = "DIC, Deformation carrier, FIB, Gratings, Microscale/nanoscale deformation, Moir{\'e}, SEM, Speckle patterns",
author = "Yanjie Li and Xie, \{Huimin M.\} and Wang, \{Qinghua H.\} and Liu, \{Zhanwei W.\}",
note = "Publisher Copyright: {\textcopyright} Springer International Publishing Switzerland 2013.",
year = "2013",
doi = "10.1007/978-3-319-02874-3\_10",
language = "英语",
series = "Lecture Notes in Nanoscale Science and Technology",
publisher = "Springer Publishing Company",
pages = "267--298",
booktitle = "Lecture Notes in Nanoscale Science and Technology",
address = "美国",
}