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Fabrication of Tungsten-based Insulation Films by Inkjet Printing and Laser Sintering

  • Xiangyu Chen
  • , Mengsen Zhang
  • , Zhi Tao
  • , Lu Qiu*
  • *Corresponding author for this work
  • Beihang University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

High temperature thin-film sensors (HTTSs) have attracted widespread attention due to their capability to provide high-precision measurements of multiple physical parameters in harsh environments. HTTSs are often prepared on high-temperature alloy builds. Insulation films need to be processed between the substrate and the sensor to prevent the conductive substrate from affecting the sensor accuracy. Materials for insulating thin films currently are predominantly insulating ceramics such as alumina and zirconia. However, limited by the brittleness and low optical absorbance of these ceramic materials, the films can only be annealed at high temperature in a resistance furnace, which imposes great limitations on processing efficiency and substrate size. In this paper, a new approach to the rapid preparation of insulation films by ink-jet printing and laser sintering on tungsten nanoparticles (W NPs) was proposed. Insulation films of resistance > 200MΩcm and an adhesive capacity of 5B are produced by laser sintering at an energy density of 60 J/mm2 on 7-μm-thick inkjet-printed tungsten nanofilms.

Original languageEnglish
Title of host publication2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Proceedings
EditorsZhidong Wang, Li Lei, Fan Yang
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages576-579
Number of pages4
ISBN (Electronic)9781665475433
DOIs
StatePublished - 2022
Event2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Tianjin, China
Duration: 8 Aug 202212 Aug 2022

Publication series

Name2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Proceedings

Conference

Conference2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022
Country/TerritoryChina
CityTianjin
Period8/08/2212/08/22

Keywords

  • inkjet printing
  • insulation films
  • laser sintering
  • tungsten nanoparticles

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