@inproceedings{435a38ebd0524c378e4ef0fb95552122,
title = "Fabrication of Tungsten-based Insulation Films by Inkjet Printing and Laser Sintering",
abstract = "High temperature thin-film sensors (HTTSs) have attracted widespread attention due to their capability to provide high-precision measurements of multiple physical parameters in harsh environments. HTTSs are often prepared on high-temperature alloy builds. Insulation films need to be processed between the substrate and the sensor to prevent the conductive substrate from affecting the sensor accuracy. Materials for insulating thin films currently are predominantly insulating ceramics such as alumina and zirconia. However, limited by the brittleness and low optical absorbance of these ceramic materials, the films can only be annealed at high temperature in a resistance furnace, which imposes great limitations on processing efficiency and substrate size. In this paper, a new approach to the rapid preparation of insulation films by ink-jet printing and laser sintering on tungsten nanoparticles (W NPs) was proposed. Insulation films of resistance > 200MΩcm and an adhesive capacity of 5B are produced by laser sintering at an energy density of 60 J/mm2 on 7-μm-thick inkjet-printed tungsten nanofilms.",
keywords = "inkjet printing, insulation films, laser sintering, tungsten nanoparticles",
author = "Xiangyu Chen and Mengsen Zhang and Zhi Tao and Lu Qiu",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 ; Conference date: 08-08-2022 Through 12-08-2022",
year = "2022",
doi = "10.1109/3M-NANO56083.2022.9941680",
language = "英语",
series = "2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "576--579",
editor = "Zhidong Wang and Li Lei and Fan Yang",
booktitle = "2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Proceedings",
address = "美国",
}