Fabrication of Plasmonic Nanoparticles on a Wave Shape PDMS Substrate

In this paper, we report on detailed fabrication process and analytical studies of plasmonic nanoparticles on flexible substrates of polydimethylsiloxane (PDMS) that are fabricated with non-flat, wavy features of surface relief. The fabrication process, like making patterns of nanocircle particles by using PDMS stamp, etching patterns in a silicon wafer, and transferring metal nanoparticles from the silicon substrate to a sinusoidal wavy elastomer PDMS substrate, is described, and this flexible material can be used to mechanically control the inter-particle spacing by applying strain, then this device’s optical properties at different strain values are characterized also. The tunability of optical resonance peaks is observed at near-infrared wavelengths with different stain values.