Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine

Yanxin Zhai; Tiantong Xu; Guoqiang Xu; Hengyi Wang; Xiaoda Cao; Haiwang Li

Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine

Yanxin Zhai
, Tiantong Xu
, Guoqiang Xu
, Hengyi Wang
, Xiaoda Cao
, Haiwang Li^*

^*Corresponding author for this work

Research institute of Aero-Engine

Beihang University
National Key Laboratory of Science and Technology on Aero Engines Aero-Thermodynamics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωum, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.

Original language	English
Title of host publication	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	2050-2053
Number of pages	4
ISBN (Electronic)	9784886864352
State	Published - 2023
Event	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023

Publication series

Name	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23

Keywords

MEMS
accelerometer
aero-engine applications
silicon carbide

Cite this

Zhai, Y., Xu, T., Xu, G., Wang, H., Cao, X., & Li, H. (2023). Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 2050-2053). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). Institute of Electrical and Electronics Engineers Inc..

Zhai, Yanxin ; Xu, Tiantong ; Xu, Guoqiang et al. / Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 2050-2053 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

@inproceedings{5a8fa01956f34ddca0b455b6186a8bc0,

title = "Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine",

abstract = "This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωum, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8\%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.",

keywords = "MEMS, accelerometer, aero-engine applications, silicon carbide",

author = "Yanxin Zhai and Tiantong Xu and Guoqiang Xu and Hengyi Wang and Xiaoda Cao and Haiwang Li",

note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "英语",

series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "2050--2053",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

address = "美国",

}

Zhai, Y, Xu, T , Xu, G, Wang, H, Cao, X & Li, H 2023, Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc., pp. 2050-2053, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, 25/06/23.

Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine. / Zhai, Yanxin; Xu, Tiantong ; Xu, Guoqiang et al.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 2050-2053 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine

AU - Zhai, Yanxin

AU - Xu, Tiantong

AU - Xu, Guoqiang

AU - Wang, Hengyi

AU - Cao, Xiaoda

AU - Li, Haiwang

PY - 2023

Y1 - 2023

N2 - This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωum, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.

AB - This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωum, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.

KW - MEMS

KW - accelerometer

KW - aero-engine applications

KW - silicon carbide

UR - https://www.scopus.com/pages/publications/85176603128

M3 - 会议稿件

AN - SCOPUS:85176603128

T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

SP - 2050

EP - 2053

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Y2 - 25 June 2023 through 29 June 2023

ER -

Zhai Y, Xu T , Xu G, Wang H, Cao X, Li H. Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 2050-2053. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine

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