TY - GEN
T1 - Fabrication of Hierarchical 3D PDMS Molds by Replica Molding from Diatom Frustules
AU - Wang, Mengjiao
AU - Jun, Cai
AU - Wang, Zhenhu
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/3
Y1 - 2018/12/3
N2 - This study presents a method to fabricate polydimethylsiloxane (PDMS) molds with hierarchical 3D structures by using the centric diatom, Coscinodiscus sp., as templates. The diatom frustules were immobilized on Si wafer, followed by casting the diluted PDMS on the substrate. After curing, the PDMS was peeled off from the Si wafer with the diatom frustules. Then it was etched in a hydrofluoric acid solution to dissolve the diatom frustules, so as to achieve the target replica mold. The parameters of replica molding process were optimized, such as the ratio of elastomer and cross-linker ratio, loading of diluents, and the time for vacuum-pumping. A PDMS negative replica opposite to the diatom frustules with micro/nano hierarchical structures were successfully obtained and the minimum structural size was 40 nm. The detailed structure of the diatom frustules was further revealed through charactering the morphology of the replica. Meanwhile, the as-prepared replica may be used as molds for soft lithography of hierarchical structures.
AB - This study presents a method to fabricate polydimethylsiloxane (PDMS) molds with hierarchical 3D structures by using the centric diatom, Coscinodiscus sp., as templates. The diatom frustules were immobilized on Si wafer, followed by casting the diluted PDMS on the substrate. After curing, the PDMS was peeled off from the Si wafer with the diatom frustules. Then it was etched in a hydrofluoric acid solution to dissolve the diatom frustules, so as to achieve the target replica mold. The parameters of replica molding process were optimized, such as the ratio of elastomer and cross-linker ratio, loading of diluents, and the time for vacuum-pumping. A PDMS negative replica opposite to the diatom frustules with micro/nano hierarchical structures were successfully obtained and the minimum structural size was 40 nm. The detailed structure of the diatom frustules was further revealed through charactering the morphology of the replica. Meanwhile, the as-prepared replica may be used as molds for soft lithography of hierarchical structures.
KW - PDMS molds
KW - diatom frustules
KW - hierarchical
KW - replica molding
UR - https://www.scopus.com/pages/publications/85060312753
U2 - 10.1109/NEMS.2018.8557028
DO - 10.1109/NEMS.2018.8557028
M3 - 会议稿件
AN - SCOPUS:85060312753
T3 - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 436
EP - 439
BT - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018
Y2 - 22 April 2018 through 26 April 2018
ER -