@inproceedings{93898988f06941a09a16bc58c5766b27,
title = "Fabrication of atmospheric pressure sensors using Au-Au bonding techniques for human activity monitoring",
abstract = "This paper reports a capacitive pressure sensor for human activity monitoring application, which is fabricated by Au-Au diffusion bonding in ambient pressure. The optimized condition for the Au-Au bonding was investigated. A maximum bonding strength of 26.7 MPa is achieved with a bonding temperature of 400°C and bonding pressure of 5.5 MPa. By measuring the pressure-capacitance characteristics of the atmospheric pressure sensor, its sensitivity is found to be 7fF/kPa with a good linearity in the ambient pressure range from 60 kPa to 100kPa.",
keywords = "Atmospheric pressure sensor, Au-Au diffusion bonding, Bonding strength",
author = "Xiuchun Hao and Yonggang Jiang and Shohei Shiono and Takayuki Fujita and Kohei Higuchi and Kazusuke Maenaka",
year = "2010",
language = "英语",
isbn = "9781424496730",
series = "2010 World Automation Congress, WAC 2010",
booktitle = "2010 World Automation Congress, WAC 2010",
note = "2010 World Automation Congress, WAC 2010 ; Conference date: 19-09-2010 Through 23-09-2010",
}