Fabrication and characterization of textured Bi₂Te₃ thermoelectric thin films prepared on glass substrates at room temperature using pulsed laser deposition

Thin films of n-type Bi₂Te₃ were fabricated on glass substrates at room temperature using pulsed laser deposition. Samples were characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, and a physical properties measurement system. The XRD and Raman results show that crystalline films can be easily achieved at room temperature, and all films have a preferred crystal growth texture along the (0 1 5) direction. SEM indicates that the films are high-quality and smooth. The Seebeck coefficient, electrical resistivity, and magnetoresistance were measured over wide ranges of temperature and magnetic field. It was found that Seebeck coefficient of the films was significantly enhanced after annealing process.