Experimental tests and numerical simulation studies on nano-indentation of TiN film deposited on N+-implanted aluminum

Ming Xu; Liuhe Li; Youming Liu; Xun Cai; Qiulong Chen; Paul K. Chu

doi:10.1016/j.surfcoat.2006.09.034

Experimental tests and numerical simulation studies on nano-indentation of TiN film deposited on N⁺-implanted aluminum

Ming Xu
, Liuhe Li
, Youming Liu
, Xun Cai
, Qiulong Chen
, Paul K. Chu^*

^*Corresponding author for this work

School of Mechanical Engineering and Automation

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Nitrogen was implanted into aluminum substrate prior to magnetron sputtering of TiN films to introduce a modified layer between the TiN film and Al substrate. In another sample, a Ti interlayer was produced on the untreated substrate by means of magnetron sputtering. From the load-displacement curves obtained by the nano-indentation tests, the ring-like cracks appeared at 38 mN on the TiN/N⁺-implanted aluminum sample, 25 mN on the TiN/Ti/aluminum sample, and 18 mN on the TiN/untreated aluminum sample. The finite element method (FEM) was used to analyze the stress distribution at the interface of the various samples. The decline in the film base tensile stress and shear stress revealed the advantages of the pre-implanted substrate. All the numerical simulation results are consistent with the increased loading capacity obtained from the load-displacement curves.

Original language	English
Pages (from-to)	6707-6711
Number of pages	5
Journal	Surface and Coatings Technology
Volume	201
Issue number	15
DOIs	https://doi.org/10.1016/j.surfcoat.2006.09.034
State	Published - 23 Apr 2007

Keywords

FEM
Magnetron sputtering
Mechanical properties
N-implanted aluminum
Nano-indentation
TiN

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10.1016/j.surfcoat.2006.09.034

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@article{1487f827c4fc4556a03a9a7e1a3cac24,

title = "Experimental tests and numerical simulation studies on nano-indentation of TiN film deposited on N+-implanted aluminum",

abstract = "Nitrogen was implanted into aluminum substrate prior to magnetron sputtering of TiN films to introduce a modified layer between the TiN film and Al substrate. In another sample, a Ti interlayer was produced on the untreated substrate by means of magnetron sputtering. From the load-displacement curves obtained by the nano-indentation tests, the ring-like cracks appeared at 38 mN on the TiN/N+-implanted aluminum sample, 25 mN on the TiN/Ti/aluminum sample, and 18 mN on the TiN/untreated aluminum sample. The finite element method (FEM) was used to analyze the stress distribution at the interface of the various samples. The decline in the film base tensile stress and shear stress revealed the advantages of the pre-implanted substrate. All the numerical simulation results are consistent with the increased loading capacity obtained from the load-displacement curves.",

keywords = "FEM, Magnetron sputtering, Mechanical properties, N-implanted aluminum, Nano-indentation, TiN",

author = "Ming Xu and Liuhe Li and Youming Liu and Xun Cai and Qiulong Chen and Chu, \{Paul K.\}",

year = "2007",

month = apr,

day = "23",

doi = "10.1016/j.surfcoat.2006.09.034",

language = "英语",

volume = "201",

pages = "6707--6711",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "15",

}

TY - JOUR

T1 - Experimental tests and numerical simulation studies on nano-indentation of TiN film deposited on N+-implanted aluminum

AU - Xu, Ming

AU - Li, Liuhe

AU - Liu, Youming

AU - Cai, Xun

AU - Chen, Qiulong

AU - Chu, Paul K.

PY - 2007/4/23

Y1 - 2007/4/23

N2 - Nitrogen was implanted into aluminum substrate prior to magnetron sputtering of TiN films to introduce a modified layer between the TiN film and Al substrate. In another sample, a Ti interlayer was produced on the untreated substrate by means of magnetron sputtering. From the load-displacement curves obtained by the nano-indentation tests, the ring-like cracks appeared at 38 mN on the TiN/N+-implanted aluminum sample, 25 mN on the TiN/Ti/aluminum sample, and 18 mN on the TiN/untreated aluminum sample. The finite element method (FEM) was used to analyze the stress distribution at the interface of the various samples. The decline in the film base tensile stress and shear stress revealed the advantages of the pre-implanted substrate. All the numerical simulation results are consistent with the increased loading capacity obtained from the load-displacement curves.

AB - Nitrogen was implanted into aluminum substrate prior to magnetron sputtering of TiN films to introduce a modified layer between the TiN film and Al substrate. In another sample, a Ti interlayer was produced on the untreated substrate by means of magnetron sputtering. From the load-displacement curves obtained by the nano-indentation tests, the ring-like cracks appeared at 38 mN on the TiN/N+-implanted aluminum sample, 25 mN on the TiN/Ti/aluminum sample, and 18 mN on the TiN/untreated aluminum sample. The finite element method (FEM) was used to analyze the stress distribution at the interface of the various samples. The decline in the film base tensile stress and shear stress revealed the advantages of the pre-implanted substrate. All the numerical simulation results are consistent with the increased loading capacity obtained from the load-displacement curves.

KW - FEM

KW - Magnetron sputtering

KW - Mechanical properties

KW - N-implanted aluminum

KW - Nano-indentation

KW - TiN

UR - https://www.scopus.com/pages/publications/33847359610

U2 - 10.1016/j.surfcoat.2006.09.034

DO - 10.1016/j.surfcoat.2006.09.034

M3 - 文章

AN - SCOPUS:33847359610

SN - 0257-8972

VL - 201

SP - 6707

EP - 6711

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 15

ER -

Experimental tests and numerical simulation studies on nano-indentation of TiN film deposited on N⁺-implanted aluminum

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Keywords

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