Abstract
Output errors of power amplifiers, hysteresis and creep error of PZTs and coupling error among the actuators are the critical factors affecting the motion accuracy of micromanipulator. Improvement of image processing speed with visual servo control method is a necessary measure for lowering the motion error of micromanipulator.
| Original language | English |
|---|---|
| Pages (from-to) | 31-33+43 |
| Journal | Guangdian Gongcheng/Opto-Electronic Engineering |
| Volume | 31 |
| Issue number | 2 |
| State | Published - Feb 2004 |
Keywords
- Error analysis
- Micromanipulator
- Piezoelectric ceramic actuators
- Servo control system
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