Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

T. Zhan; R. Yamato; S. Hashimoto; S. Oba; Y. Himeda; Y. Xu; T. Matsukawa; T. Watanabe

doi:10.1088/1742-6596/1052/1/012131

Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

T. Zhan
, R. Yamato
, S. Hashimoto
, S. Oba
, Y. Himeda
, Y. Xu
, T. Matsukawa
, T. Watanabe

Research output: Contribution to journal › Conference article › peer-review

Abstract

We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

Original language	English
Article number	012131
Journal	Journal of Physics: Conference Series
Volume	1052
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/1052/1/012131
State	Published - 26 Jul 2018
Externally published	Yes
Event	17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan Duration: 14 Nov 2017 → 17 Nov 2017

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10.1088/1742-6596/1052/1/012131

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Zhan, T., Yamato, R., Hashimoto, S., Oba, S., Himeda, Y., Xu, Y., Matsukawa, T., & Watanabe, T. (2018). Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film. Journal of Physics: Conference Series, 1052(1), Article 012131. https://doi.org/10.1088/1742-6596/1052/1/012131

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title = "Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film",

abstract = "We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.",

author = "T. Zhan and R. Yamato and S. Hashimoto and S. Oba and Y. Himeda and Y. Xu and T. Matsukawa and T. Watanabe",

note = "Publisher Copyright: {\textcopyright} Published under licence by IOP Publishing Ltd.; 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 ; Conference date: 14-11-2017 Through 17-11-2017",

year = "2018",

month = jul,

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doi = "10.1088/1742-6596/1052/1/012131",

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T1 - Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

AU - Zhan, T.

AU - Yamato, R.

AU - Hashimoto, S.

AU - Oba, S.

AU - Himeda, Y.

AU - Xu, Y.

AU - Matsukawa, T.

AU - Watanabe, T.

N1 - Publisher Copyright: © Published under licence by IOP Publishing Ltd.

PY - 2018/7/26

Y1 - 2018/7/26

N2 - We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

AB - We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

UR - https://www.scopus.com/pages/publications/85051323192

U2 - 10.1088/1742-6596/1052/1/012131

DO - 10.1088/1742-6596/1052/1/012131

M3 - 会议文章

AN - SCOPUS:85051323192

SN - 1742-6588

VL - 1052

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012131

T2 - 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017

Y2 - 14 November 2017 through 17 November 2017

ER -

Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

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