Abstract
Modeling radio frequency micro-electro-mechanical system (RF MEMS) device for electromagnetic analysis is difficulty, especially with small feature size and movable structures. A new electro-magnetic modeling method, deformed alternating-direction implicit method finite difference time domain (DADI-FDTD), is proposed. The dynamic equation of motion is dispersed in time domain using finite difference methods (FDM). Numerical dispersion is discussed in the three-dimensional ADI-FDTD method. A new algorithm, dielectric interpolations, is presented, it is capable of solving the conflict of the time and special steps between the mechanical portion and electromagnetic (EM) portion. And it's able to implement the EM modeling in time domain of complex three-dimensional structures. Simulation results demonstrate the feasibility of the method.
| Original language | English |
|---|---|
| Pages (from-to) | 10-14 |
| Number of pages | 5 |
| Journal | Beijing Youdian Xueyuan Xuebao/Journal of Beijing University of Posts And Telecommunications |
| Volume | 31 |
| Issue number | 2 |
| State | Published - Apr 2008 |
Keywords
- Electromagnetic modeling
- Linear interpolation
- Radio frequency microelectromechanical system devices
- Wireless sensor network
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