Electromagnetic energy harvester by using buried NdFeB

S. Miki; T. Fujita; T. Kotoge; Y. G. Jiang; M. Uehara; K. Kanda; K. Higuchi; K. Maenaka

doi:10.1109/MEMSYS.2012.6170409

Electromagnetic energy harvester by using buried NdFeB

S. Miki^*
, T. Fujita
, T. Kotoge
, Y. G. Jiang
, M. Uehara
, K. Kanda
, K. Higuchi
, K. Maenaka

^*Corresponding author for this work

School of Mechanical Engineering and Automation

University of Hyogo
JST ERATO Maenaka Human-Sensing Fusion Project
Hitachi, Ltd.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

28 Scopus citations

Abstract

This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm _p-p at 94.9 Hz.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1221-1224
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170409
State	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

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10.1109/MEMSYS.2012.6170409

Cite this

Miki, S., Fujita, T., Kotoge, T., Jiang, Y. G., Uehara, M., Kanda, K., Higuchi, K., & Maenaka, K. (2012). Electromagnetic energy harvester by using buried NdFeB. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1221-1224). Article 6170409 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170409

@inproceedings{4c2ff286d8484f44b75e29f099aaed68,

title = "Electromagnetic energy harvester by using buried NdFeB",

abstract = "This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm p-p at 94.9 Hz.",

author = "S. Miki and T. Fujita and T. Kotoge and Jiang, \{Y. G.\} and M. Uehara and K. Kanda and K. Higuchi and K. Maenaka",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170409",

language = "英语",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1221--1224",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Miki, S, Fujita, T, Kotoge, T, Jiang, YG, Uehara, M, Kanda, K, Higuchi, K & Maenaka, K 2012, Electromagnetic energy harvester by using buried NdFeB. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170409, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1221-1224, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170409

Electromagnetic energy harvester by using buried NdFeB. / Miki, S.; Fujita, T.; Kotoge, T. et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1221-1224 6170409 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Electromagnetic energy harvester by using buried NdFeB

AU - Miki, S.

AU - Fujita, T.

AU - Kotoge, T.

AU - Jiang, Y. G.

AU - Uehara, M.

AU - Kanda, K.

AU - Higuchi, K.

AU - Maenaka, K.

PY - 2012

Y1 - 2012

N2 - This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm p-p at 94.9 Hz.

AB - This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm p-p at 94.9 Hz.

UR - https://www.scopus.com/pages/publications/84860436227

U2 - 10.1109/MEMSYS.2012.6170409

DO - 10.1109/MEMSYS.2012.6170409

M3 - 会议稿件

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SN - 9781467303248

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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EP - 1224

BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

Electromagnetic energy harvester by using buried NdFeB

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