Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

Youming Liu; Liuhe Li; Ming Xu; Xun Cai; Qiulong Chen; Yawei Hu; Paul K. Chu

doi:10.1016/j.msea.2005.09.063

Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

Youming Liu
, Liuhe Li
, Ming Xu
, Xun Cai
, Qiulong Chen
, Yawei Hu
, Paul K. Chu^*

^*Corresponding author for this work

School of Mechanical Engineering and Automation

Shanghai Jiao Tong University
City University of Hong Kong

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum.

Original language	English
Pages (from-to)	140-144
Number of pages	5
Journal	Materials Science and Engineering: A
Volume	415
Issue number	1-2
DOIs	https://doi.org/10.1016/j.msea.2005.09.063
State	Published - 15 Jan 2006

Keywords

Adhesion strength
Frictional behavior
Nitrogen ion implantation
TiN films

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10.1016/j.msea.2005.09.063

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title = "Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering",

abstract = "The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum.",

keywords = "Adhesion strength, Frictional behavior, Nitrogen ion implantation, TiN films",

author = "Youming Liu and Liuhe Li and Ming Xu and Xun Cai and Qiulong Chen and Yawei Hu and Chu, \{Paul K.\}",

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doi = "10.1016/j.msea.2005.09.063",

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TY - JOUR

T1 - Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

AU - Liu, Youming

AU - Li, Liuhe

AU - Xu, Ming

AU - Cai, Xun

AU - Chen, Qiulong

AU - Hu, Yawei

AU - Chu, Paul K.

PY - 2006/1/15

Y1 - 2006/1/15

N2 - The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum.

AB - The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum.

KW - Adhesion strength

KW - Frictional behavior

KW - Nitrogen ion implantation

KW - TiN films

UR - https://www.scopus.com/pages/publications/29244491683

U2 - 10.1016/j.msea.2005.09.063

DO - 10.1016/j.msea.2005.09.063

M3 - 文章

AN - SCOPUS:29244491683

SN - 0921-5093

VL - 415

SP - 140

EP - 144

JO - Materials Science and Engineering: A

JF - Materials Science and Engineering: A

IS - 1-2

ER -

Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

Abstract

Keywords

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