Dynamic modeling of a novel 3-DOF micropositioning table for surface grinding control

In order to realize dynamic control during surface grinding, a 3-DOF (degree of freedom) micropositioning table driven by three piezoelectric actuators has been developed. The monolithic flexure hinge mechanism is utilized to provide preload for the piezoelectric actuators. The table has an outline dimension of Φ150×145 mm and a working range of 12 μm. The resolution of the table is less than 5 nm and the stiffness under open loop condition is approximately up to 94 N/μm. The design of the micropositioning table is presented with consideration to achieve the high dynamic characteristics. The dynamic models of the table have been established. Experimental tests have been carried out to verify the performance of the micropositioning table and the established models.