Digital holographic detection of surface of optic component

A digital holographic method is proposed to detect the surface quanlity of optic-components with spherical surface. It can obtain the surface curvature radius and defects simultaneously, and uses the least square parameter calculation to avoid the effects of tilt compensation. The defects are extracted by subtracting a simulated spherical surface generated by the calculated parameters from reconstruction data. Validity of the method is demonstrated by experiments. The difference is less than 1.5% between the results of the proposed method and white light interferometer, and less than 1% among the results obtained with different tilt compensation factors.