Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

Huicong Liu; Songsong Zhang; Ramprakash Kathiresan; Takeshi Kobayashi; Chengkuo Lee

doi:10.1063/1.4723846

Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

Huicong Liu
, Songsong Zhang
, Ramprakash Kathiresan
, Takeshi Kobayashi
, Chengkuo Lee^*

^*Corresponding author for this work

National University of Singapore
National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

143 Scopus citations

Abstract

We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 kΩ are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm ³. The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.

Original language	English
Article number	223905
Journal	Applied Physics Letters
Volume	100
Issue number	22
DOIs	https://doi.org/10.1063/1.4723846
State	Published - 28 May 2012
Externally published	Yes

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title = "Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability",

abstract = "We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 kΩ are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm 3. The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.",

author = "Huicong Liu and Songsong Zhang and Ramprakash Kathiresan and Takeshi Kobayashi and Chengkuo Lee",

year = "2012",

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doi = "10.1063/1.4723846",

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T1 - Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

AU - Liu, Huicong

AU - Zhang, Songsong

AU - Kathiresan, Ramprakash

AU - Kobayashi, Takeshi

AU - Lee, Chengkuo

PY - 2012/5/28

Y1 - 2012/5/28

N2 - We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 kΩ are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm 3. The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.

AB - We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 kΩ are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm 3. The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.

UR - https://www.scopus.com/pages/publications/84862141483

U2 - 10.1063/1.4723846

DO - 10.1063/1.4723846

M3 - 文章

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SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 22

M1 - 223905

ER -

Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

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