TY - GEN
T1 - Development of Large-Range Rotary Interferometer using a Genetic Algorithm for Miniature FTIR Spectrometer
AU - Qian, Honglin
AU - Dai, Huanyu
AU - Zhu, Minjie
AU - Jiang, Yonggang
AU - Li, Bing
AU - Xue, Gaopeng
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - This study innovatively proposes a MEMS interferometer structure integrated with a rotary comb actuator and four corner cube mirrors for the application of Fourier transform infrared (FTIR) spectroscopy. Two orthogonally distributed corner cube mirrors are rotationally actuated by rotary comb actuators, capable of generating a differentially amplified optical path difference. To achieve a larger angular displacement at a lower actuation voltage, the support spring, as the critical part of the rotary comb actuator, is optimized with a curved configuration affording a low twisted flexibility and a high lateral stiffness. The genetic algorithm (GA)-based design methodology is introduced for optimization by a parametrized mechanical model analysis in finite element simulation and a GA in scientific computing. Finally, the functional structures including the rotary comb actuators and the corner cube mirrors are fabricated from a monolithic SOI wafer. The miniature interferometer can provide a large optical path difference of 81.5 μm at an actuation voltage of 55 V, which is applicable in the field of FTIR spectroscopy.
AB - This study innovatively proposes a MEMS interferometer structure integrated with a rotary comb actuator and four corner cube mirrors for the application of Fourier transform infrared (FTIR) spectroscopy. Two orthogonally distributed corner cube mirrors are rotationally actuated by rotary comb actuators, capable of generating a differentially amplified optical path difference. To achieve a larger angular displacement at a lower actuation voltage, the support spring, as the critical part of the rotary comb actuator, is optimized with a curved configuration affording a low twisted flexibility and a high lateral stiffness. The genetic algorithm (GA)-based design methodology is introduced for optimization by a parametrized mechanical model analysis in finite element simulation and a GA in scientific computing. Finally, the functional structures including the rotary comb actuators and the corner cube mirrors are fabricated from a monolithic SOI wafer. The miniature interferometer can provide a large optical path difference of 81.5 μm at an actuation voltage of 55 V, which is applicable in the field of FTIR spectroscopy.
KW - FTIR spectrometers
KW - MEMS interferometer
KW - curved support spring
KW - genetic algorithm
KW - rotary comb actuator
UR - https://www.scopus.com/pages/publications/105001663821
U2 - 10.1109/MEMS61431.2025.10917771
DO - 10.1109/MEMS61431.2025.10917771
M3 - 会议稿件
AN - SCOPUS:105001663821
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 728
EP - 731
BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Y2 - 19 January 2025 through 23 January 2025
ER -