@inproceedings{cfacade948574a318071b509c15c3f04,
title = "Development of Flexible Piezoelectric Hair-Like Dual-Mode Sensor for Detection of Airflow and Acoustic Particle Velocity",
abstract = "This paper presents a highly sensitive flexible piezoelectric hair-like dual-mode sensor for the detection of airflow and acoustic particle velocity. The sensor was fabricated by a novel stress-induced self-bending process using flexible polyimide (PI) and lead zirconate titanate (PZT). The performance of the hair-like dual-mode sensor was evaluated with alternating wind speed and pulsed sound source. The wind speed detection threshold is 0.07 m/s, and the sensitivity to acoustic particle velocity is 0.087 mV/(mm/s)2 with a resolution of 4.04 mm/s. Compared to the non-resonant state, the sensitivity at resonance (1409 Hz) is increased by 23 times. The bionic flexible airflow and acoustic particle velocity sensor provides a new method for multi-signal measurements in complex scenes.",
keywords = "bionic sensor, dual-mode sensor, flexible electronic",
author = "Biao Jin and Hongchao Cao and Tianyu Sheng and Qipei He and Yansong Gai and Yonggang Jiang",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "英语",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1575--1578",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "美国",
}