Development of an on-Chip Millimeter-Wave Antenna

  • Ziqi Mei
  • , Chao Liang
  • , Enze Zhou
  • , Yan Zhang
  • , Ji Li
  • , Rongbo Xie
  • , Bingbai Li
  • , Xiayu Wang
  • , Chi Zhang
  • , Rui You
  • , Xiaoguang Zhao*
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports an on-chip antenna (OCA) operating in millimeter-wave (MM-Wave) band based on high-resistivity silicon substrate, with a small size of 2.0×2.0×0.3 mm3. The proposed OCA offered an impendence bandwidth from 78.76 GHz to 86.02 GHz for S11 less than -10 dB. The OCA designed was fabricated using complementary metal oxide semiconductor (CMOS) process. Utilizing gold wire bonding, the OCA was fed through a substrate integrated waveguide-to-coplanar waveguide transition interfacing with a rectangular WR10 waveguide, and the measurement was performed in a microwave anechoic chamber. The OCA showed a maximum simulated gain of 3.204 dBi at 79 GHz and a maximum simulated radiation efficiency of 74.61% at 89 GHz. The demonstration of the OCA potentiates short range wireless communication like inter-chip wireless interconnections.

Original languageEnglish
Title of host publication9th IEEE Electron Devices Technology and Manufacturing Conference
Subtitle of host publicationShaping the Future with Innovations in Devices and Manufacturing, EDTM 2025
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798331504168
DOIs
StatePublished - 2025
Externally publishedYes
Event9th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2025 - Hong Kong, Hong Kong SAR
Duration: 9 Mar 202512 Mar 2025

Publication series

Name9th IEEE Electron Devices Technology and Manufacturing Conference: Shaping the Future with Innovations in Devices and Manufacturing, EDTM 2025

Conference

Conference9th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2025
Country/TerritoryHong Kong SAR
CityHong Kong
Period9/03/2512/03/25

Keywords

  • CMOS
  • MM-Wave
  • OCA

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