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Development of a compact and cost effective MSL system based on a compliant nanomanipulator

  • Zheng Liu
  • , Zhen Zhang*
  • , Yingchun Guan
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper proposes a compact and cost-effective MSL (Micro Stereo Lithography) prototyping system. A self-developed compliant XY nanomanipulating stage is responsible for the fabrication quality in one layer. And a blu-ray LED laser module is utilized as a cost-effective light source. The experimental results show that the MSL prototyping system is capable of achieving ∼ 2 µm cured width for circular patterns.

Original languageEnglish
Title of host publication15th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791859292
DOIs
StatePublished - 2019
EventASME 2019 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC-CIE 2019 - Anaheim, United States
Duration: 18 Aug 201921 Aug 2019

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume9

Conference

ConferenceASME 2019 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC-CIE 2019
Country/TerritoryUnited States
CityAnaheim
Period18/08/1921/08/19

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