Abstract
This paper addresses the design and control issues of a novel micromanipulator which uses a 3-DOF parallel compliant mechanism driven by PZT actuators. Based on the pseudo-rigid-body model of the mechanism, both its conceptual design considerations and the final prototype are outlined first. In order to achieve a fine close-loop control for the PZT, a control law called Variable Speed Integral PI with Switched Parameters is employed based on a simplified but effective dynamic model of PZT actuators. Results from performance testing of the prototype compliant micromanipulator demonstrate that it has repeatability with less than 1 micron. The compliant stage is used as a high-precision bioengineering-oriented micromanipulator.
| Original language | English |
|---|---|
| Pages (from-to) | 915-920 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5253 |
| DOIs | |
| State | Published - 2003 |
| Event | Fifth International Symposium on Instrumentation and Control Technology - Beijing, China Duration: 24 Oct 2003 → 27 Oct 2003 |
Keywords
- Compliant mechanism
- Flexure hinge
- Micromanipulation
- PZT
- Parallel mechanism
- Repeatability
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