Design on the driving mode of MEMS vibratory gyroscope

Ranran Yi; Bangcheng Han; Wei Sheng

doi:10.1007/978-3-540-88518-4_26

Design on the driving mode of MEMS vibratory gyroscope

Ranran Yi^*
, Bangcheng Han
, Wei Sheng

^*Corresponding author for this work

Lab. of Fundamental Sci. for Natl. Defense of Novel Inertial Instrum. and Navigation Syst. Technol.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy and stability of the system. In the frequency locking circuit, two ways of PLL (Phase Locked Loop) and self-oscillation are used to improve the reliability of the system. Different levels of simulation and circuit implementation are made using the working mode and parameter of the dual-tuner output-quality pieces of silicon MEMS gyroscope which is designed by our own laboratory.

Original language	English
Title of host publication	Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings
Pages	232-239
Number of pages	8
Edition	PART 2
DOIs	https://doi.org/10.1007/978-3-540-88518-4_26
State	Published - 2008
Externally published	Yes
Event	1st International Conference on Intelligent Robotics and Applications, ICIRA 2008 - Wuhan, China Duration: 15 Oct 2008 → 17 Oct 2008

Publication series

Name	Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Number	PART 2
Volume	5315 LNAI
ISSN (Print)	0302-9743
ISSN (Electronic)	1611-3349

Conference

Conference	1st International Conference on Intelligent Robotics and Applications, ICIRA 2008
Country/Territory	China
City	Wuhan
Period	15/10/08 → 17/10/08

Keywords

Fixed amplitude
MEMS
Multisim
PLL
Self-oscillation

Access to Document

10.1007/978-3-540-88518-4_26

Cite this

Yi, R., Han, B., & Sheng, W. (2008). Design on the driving mode of MEMS vibratory gyroscope. In Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings (PART 2 ed., pp. 232-239). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 5315 LNAI, No. PART 2). https://doi.org/10.1007/978-3-540-88518-4_26

Yi, Ranran ; Han, Bangcheng ; Sheng, Wei. / Design on the driving mode of MEMS vibratory gyroscope. Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings. PART 2. ed. 2008. pp. 232-239 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 2).

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abstract = "Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy and stability of the system. In the frequency locking circuit, two ways of PLL (Phase Locked Loop) and self-oscillation are used to improve the reliability of the system. Different levels of simulation and circuit implementation are made using the working mode and parameter of the dual-tuner output-quality pieces of silicon MEMS gyroscope which is designed by our own laboratory.",

keywords = "Fixed amplitude, MEMS, Multisim, PLL, Self-oscillation",

author = "Ranran Yi and Bangcheng Han and Wei Sheng",

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series = "Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)",

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booktitle = "Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings",

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note = "1st International Conference on Intelligent Robotics and Applications, ICIRA 2008 ; Conference date: 15-10-2008 Through 17-10-2008",

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Yi, R, Han, B & Sheng, W 2008, Design on the driving mode of MEMS vibratory gyroscope. in Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings. PART 2 edn, Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics), no. PART 2, vol. 5315 LNAI, pp. 232-239, 1st International Conference on Intelligent Robotics and Applications, ICIRA 2008, Wuhan, China, 15/10/08. https://doi.org/10.1007/978-3-540-88518-4_26

Design on the driving mode of MEMS vibratory gyroscope. / Yi, Ranran; Han, Bangcheng; Sheng, Wei.
Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings. PART 2. ed. 2008. p. 232-239 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 5315 LNAI, No. PART 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy and stability of the system. In the frequency locking circuit, two ways of PLL (Phase Locked Loop) and self-oscillation are used to improve the reliability of the system. Different levels of simulation and circuit implementation are made using the working mode and parameter of the dual-tuner output-quality pieces of silicon MEMS gyroscope which is designed by our own laboratory.

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Yi R, Han B, Sheng W. Design on the driving mode of MEMS vibratory gyroscope. In Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings. PART 2 ed. 2008. p. 232-239. (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 2). doi: 10.1007/978-3-540-88518-4_26

Design on the driving mode of MEMS vibratory gyroscope

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