Design of quasi-planar ridge SOI waveguide resonator for integrated optical gyro

In order to realize the opto-electronic integration of optic gyro, the quasi-planar ridge SOI waveguide resonator is proposed due to its low loss and small bend radius. First, the single mode condition and smallest bend radius were simulated by using the 3-dimension finite difference beam propagation method (3-D BPM). Then the relationship between the sensitivity of gyro and the resonator characteristics, such as radius and coupling coefficient, was analyzed by applying the model of the integrated optical gyro. Based on these simulations, the ridge height and width of the waveguide were 220 nm and 1.2 μm respectively and the smallest bend radius was 600μm. It is shown that the theoretical detection limit of the gyro was 0.031 °/s when the resonator diameter was 5cm and the coupler's splitting ratio was 46.7:53.3. This gyro system is suitable for tactical and civil applications.