@inproceedings{18d635a455db4d84897e86103fcb7f9a,
title = "Design of monolithic differential quartz vibrating beam accelerometer with optimized electrode layout",
abstract = "The electrode layout determines the piezoelectric performance of quartz resonator and directly affects the precision of the quartz VBA. We presented a novel monolithic differential quartz VBA with optimized electrode layout and solved the lock-in problem due to mechanical coupling. Based on the mass-equivalent system, an analytical model was developed and the uncoupling condition of the monolithic differential quartz VBA was deduced. Then we proposed five different electrode layouts and the optimum one was determined via simulation of piezoelectric and harmonic characteristics of quartz resonator with ANSYS. As a result, the mechanical coupling can be eliminated and at the same time, ±100 g measurement range and 80Hz/g scale factor can be achieved. The optimum electrode layout can drive quartz resonator in the desired modal. The presented device with advantages of miniaturization, low mechanical coupling, none assembly errors and high electromechanical coupling efficiency is very promising in the high-precision quartz VBA.",
keywords = "Electrode layout, Finite element analysis, Monolithic differential vibrating beam accelerometer, Quartz resonator",
author = "Wenpu Wang and Zhen Zhou and Lishuang Feng and Baoyin Yao and Gongliu Yang",
year = "2013",
doi = "10.4028/www.scientific.net/KEM.562-565.322",
language = "英语",
isbn = "9783037857397",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "322--327",
booktitle = "Micro-Nano Technology XIV",
address = "瑞士",
note = "14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 ; Conference date: 04-11-2012 Through 07-11-2012",
}