Abstract
A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.
| Original language | English |
|---|---|
| Pages (from-to) | 270-271 |
| Number of pages | 2 |
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 131 |
| Issue number | 7 |
| DOIs | |
| State | Published - 2011 |
Keywords
- Minimum detectable force
- Nanocantilever
- Piezoresistive
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