Design and simulated calculation of Si-based micromechanical resonant accelerometer

Jie Ren; Shang Chun Fan

Design and simulated calculation of Si-based micromechanical resonant accelerometer

Jie Ren^*
, Shang Chun Fan

^*Corresponding author for this work

School of Instrumentation and Optoelectronic Engineering

Beihang University

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This paper analyses the work mechanism of Si-based micromechanical resonant accelerometer, presents a new structural style and makes the structure optimization design and simulation calculation. The structure parameters' influence on capability parameters are analyzed by MATLAB, the structure parameters are optimized by ISIGHT, the mechanical and model analysis of structure are carried out by ANSYS. Simulating results validates the design thought and optimization parameters are available.

Original language	English
Pages (from-to)	1992-1995
Number of pages	4
Journal	Chinese Journal of Sensors and Actuators
Volume	20
Issue number	9
State	Published - Sep 2007

Keywords

MEMS
Micromechanical resonant accelerometer
Resonator

Cite this

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title = "Design and simulated calculation of Si-based micromechanical resonant accelerometer",

abstract = "This paper analyses the work mechanism of Si-based micromechanical resonant accelerometer, presents a new structural style and makes the structure optimization design and simulation calculation. The structure parameters' influence on capability parameters are analyzed by MATLAB, the structure parameters are optimized by ISIGHT, the mechanical and model analysis of structure are carried out by ANSYS. Simulating results validates the design thought and optimization parameters are available.",

keywords = "MEMS, Micromechanical resonant accelerometer, Resonator",

author = "Jie Ren and Fan, \{Shang Chun\}",

year = "2007",

month = sep,

language = "英语",

volume = "20",

pages = "1992--1995",

journal = "Chinese Journal of Sensors and Actuators",

issn = "1004-1699",

publisher = "Guojia Jiaowei Quanguo Gaoxiao Chuangan Jishu Yanjiuhui",

number = "9",

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TY - JOUR

T1 - Design and simulated calculation of Si-based micromechanical resonant accelerometer

AU - Ren, Jie

AU - Fan, Shang Chun

PY - 2007/9

Y1 - 2007/9

N2 - This paper analyses the work mechanism of Si-based micromechanical resonant accelerometer, presents a new structural style and makes the structure optimization design and simulation calculation. The structure parameters' influence on capability parameters are analyzed by MATLAB, the structure parameters are optimized by ISIGHT, the mechanical and model analysis of structure are carried out by ANSYS. Simulating results validates the design thought and optimization parameters are available.

AB - This paper analyses the work mechanism of Si-based micromechanical resonant accelerometer, presents a new structural style and makes the structure optimization design and simulation calculation. The structure parameters' influence on capability parameters are analyzed by MATLAB, the structure parameters are optimized by ISIGHT, the mechanical and model analysis of structure are carried out by ANSYS. Simulating results validates the design thought and optimization parameters are available.

KW - MEMS

KW - Micromechanical resonant accelerometer

KW - Resonator

UR - https://www.scopus.com/pages/publications/36148997713

M3 - 文章

AN - SCOPUS:36148997713

SN - 1004-1699

VL - 20

SP - 1992

EP - 1995

JO - Chinese Journal of Sensors and Actuators

JF - Chinese Journal of Sensors and Actuators

IS - 9

ER -

Design and simulated calculation of Si-based micromechanical resonant accelerometer

Abstract

Keywords

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