Design and optimization of slit-resonant beam in a MEMS pressure sensor based on uncertainty analysis

Uncertainty method incorporating the parametric uncertainty distribution is used to systematically investigate the influence of different slit sizes and excitation parameters on performance of double-clamped resonant beam with slit structure in a MEMS resonant pressure sensor, when inherent heat elevation of electro-thermal excitation is taken into account. The theoretical vibration model of double-clamped resonant beam with slit structure is established, and the inherent heat elevation of electro-thermal excitation is analyzed. The sample-based stochastic model is established to investigate the influence of different uncertain slit sizes and excitation parameters on performance of slit-resonant beam. Beside the theoretical vibration model, the neural network model is established and trained by sufficient data obtained by finite element method (FEM), and is used for the uncertainty method to obtain effects of different slit sizes on the performance of slit- resonant beam, which verified the results obtained by uncertainty method using the theoretical vibration model of slit-resonant beam. The results reveal the different influences of slit size and excitation parameters, which can be used as reference for design and optimization of the slit structure and sensor performances.