Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

Huichao Shi; Shangchun Fan; Wenlong Li

doi:10.1007/s00542-017-3599-y

Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

Huichao Shi^*
, Shangchun Fan
, Wenlong Li

^*Corresponding author for this work

School of Instrumentation and Optoelectronic Engineering

Beijing University of Chemical Technology
North Automatic Control Technology Research Institute

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution is conducted by establishing the sample-based stochastic model to systematically investigate the influence of different geometry parameters of the DETF resonator on the natural frequency and the sensitivity of DETF resonator. The results reveal the different influences of geometry parameters, which can be used as reference for design and optimization of the DETF resonator of the micro-accelerometer.

Original language	English
Pages (from-to)	2025-2034
Number of pages	10
Journal	Microsystem Technologies
Volume	24
Issue number	4
DOIs	https://doi.org/10.1007/s00542-017-3599-y
State	Published - 1 Apr 2018

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title = "Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer",

abstract = "Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution is conducted by establishing the sample-based stochastic model to systematically investigate the influence of different geometry parameters of the DETF resonator on the natural frequency and the sensitivity of DETF resonator. The results reveal the different influences of geometry parameters, which can be used as reference for design and optimization of the DETF resonator of the micro-accelerometer.",

author = "Huichao Shi and Shangchun Fan and Wenlong Li",

note = "Publisher Copyright: {\textcopyright} 2017, Springer-Verlag GmbH Germany.",

year = "2018",

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doi = "10.1007/s00542-017-3599-y",

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T1 - Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

AU - Shi, Huichao

AU - Fan, Shangchun

AU - Li, Wenlong

PY - 2018/4/1

Y1 - 2018/4/1

N2 - Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution is conducted by establishing the sample-based stochastic model to systematically investigate the influence of different geometry parameters of the DETF resonator on the natural frequency and the sensitivity of DETF resonator. The results reveal the different influences of geometry parameters, which can be used as reference for design and optimization of the DETF resonator of the micro-accelerometer.

AB - Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution is conducted by establishing the sample-based stochastic model to systematically investigate the influence of different geometry parameters of the DETF resonator on the natural frequency and the sensitivity of DETF resonator. The results reveal the different influences of geometry parameters, which can be used as reference for design and optimization of the DETF resonator of the micro-accelerometer.

UR - https://www.scopus.com/pages/publications/85032355387

U2 - 10.1007/s00542-017-3599-y

DO - 10.1007/s00542-017-3599-y

M3 - 文章

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SN - 0946-7076

VL - 24

SP - 2025

EP - 2034

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 4

ER -

Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

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