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Design and comparison of three-type VCMs for nano-positioning system

  • Liang Dong
  • , Jinhua Chen
  • , Chi Zhang*
  • , Dingbing Wu
  • , Guangwei Yu
  • , Qiang Liu
  • *Corresponding author for this work
  • CAS - Ningbo Institute of Material Technology and Engineering
  • Shanghai University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper introduces three-type voice coil motors (VCMs) for nano-positioning system. These VCMs all consists dual-magnet stator and coil mover which is sandwiched between these two-layer magnets with different topology structures of the stators and movers. The motor structures, magnetic field distribution, thrust force and force ripple of these VCMs are studied and compared. Equivalent magnetic circuit method and the finite element analysis (FEA) are employed to analyze the performance of these VCMs. The results show that the VCM with Halbach array permanent magnets and three-segment coil mover has the largest force constant and smallest force ripple. A prototype of the Halbach VCM is manufactured and tested. The experimental results accord well with which of the simulation.

Original languageEnglish
Title of host publicationProceedings of the 2016 IEEE 11th Conference on Industrial Electronics and Applications, ICIEA 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1656-1660
Number of pages5
ISBN (Electronic)9781509026050
DOIs
StatePublished - 19 Oct 2016
Externally publishedYes
Event11th IEEE Conference on Industrial Electronics and Applications, ICIEA 2016 - Hefei, China
Duration: 5 Jun 20167 Jun 2016

Publication series

NameProceedings of the 2016 IEEE 11th Conference on Industrial Electronics and Applications, ICIEA 2016

Conference

Conference11th IEEE Conference on Industrial Electronics and Applications, ICIEA 2016
Country/TerritoryChina
CityHefei
Period5/06/167/06/16

Keywords

  • FEA
  • VCM
  • dual-magnet
  • equivalent magnetic circuit method

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