Abstract
In this study, we present an approach for micromechanical resonant accelerometer design, structural optimization and testing method of a kind of resonant accelerometer which is excited by theelectrostatic force and detected by the change of capacitance. The structure parameters' influenceon capability parameters are analyzed by MATLAB and the mechanical and model analysis of structureare carried out by ANSYS, also, we optimized the structure parameters. Simulating results validates the design thought.
| Original language | English |
|---|---|
| Pages (from-to) | 970-974 |
| Number of pages | 5 |
| Journal | Research Journal of Applied Sciences, Engineering and Technology |
| Volume | 5 |
| Issue number | 3 |
| DOIs | |
| State | Published - 2013 |
Keywords
- Model analysis
- Silicon resonant accelerometer
- Structure optimization
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