Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation

Y. Xu; L. H. Li; P. K. Chu

doi:10.1016/j.surfcoat.2014.12.053

Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation

Y. Xu
, L. H. Li^*
, P. K. Chu

^*Corresponding author for this work

School of Mechanical Engineering and Automation

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Diamond-like carbon (DLC) films are deposited on the interior surface of 100. mm long quartz glass tubes with inner diameters of 6, 4, and 0.9. mm by enhanced glow discharge plasma immersion ion implantation (EGD-PIII) at 10. kV. The acetylene plasma is generated inside the tube by electrons created in the plasma near the substrate and secondary electrons from ion bombardment. Acetylene gas pressure distribution obtained from finite element method shows that the pressure varies linearly from the inlet to the outlet of the tube. The electron mean free path, λ_e, and collision frequency, ν_e, are introduced to qualitatively explain the non-uniform DLC film thickness. Raman scattering indicates that the DLC films at different locations have a similar structure.

Original language	English
Pages (from-to)	218-221
Number of pages	4
Journal	Surface and Coatings Technology
Volume	265
DOIs	https://doi.org/10.1016/j.surfcoat.2014.12.053
State	Published - 15 Mar 2015

Keywords

Diamond-like carbon (DLC)
Enhanced glow discharge plasma immersion ion implantation (EGD-PIII)
Film deposition
Inner surfaces

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10.1016/j.surfcoat.2014.12.053

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title = "Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation",

abstract = "Diamond-like carbon (DLC) films are deposited on the interior surface of 100. mm long quartz glass tubes with inner diameters of 6, 4, and 0.9. mm by enhanced glow discharge plasma immersion ion implantation (EGD-PIII) at 10. kV. The acetylene plasma is generated inside the tube by electrons created in the plasma near the substrate and secondary electrons from ion bombardment. Acetylene gas pressure distribution obtained from finite element method shows that the pressure varies linearly from the inlet to the outlet of the tube. The electron mean free path, λe, and collision frequency, νe, are introduced to qualitatively explain the non-uniform DLC film thickness. Raman scattering indicates that the DLC films at different locations have a similar structure.",

keywords = "Diamond-like carbon (DLC), Enhanced glow discharge plasma immersion ion implantation (EGD-PIII), Film deposition, Inner surfaces",

author = "Y. Xu and Li, \{L. H.\} and Chu, \{P. K.\}",

note = "Publisher Copyright: {\textcopyright} 2015 Elsevier B.V.",

year = "2015",

month = mar,

day = "15",

doi = "10.1016/j.surfcoat.2014.12.053",

language = "英语",

volume = "265",

pages = "218--221",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation

AU - Xu, Y.

AU - Li, L. H.

AU - Chu, P. K.

PY - 2015/3/15

Y1 - 2015/3/15

N2 - Diamond-like carbon (DLC) films are deposited on the interior surface of 100. mm long quartz glass tubes with inner diameters of 6, 4, and 0.9. mm by enhanced glow discharge plasma immersion ion implantation (EGD-PIII) at 10. kV. The acetylene plasma is generated inside the tube by electrons created in the plasma near the substrate and secondary electrons from ion bombardment. Acetylene gas pressure distribution obtained from finite element method shows that the pressure varies linearly from the inlet to the outlet of the tube. The electron mean free path, λe, and collision frequency, νe, are introduced to qualitatively explain the non-uniform DLC film thickness. Raman scattering indicates that the DLC films at different locations have a similar structure.

AB - Diamond-like carbon (DLC) films are deposited on the interior surface of 100. mm long quartz glass tubes with inner diameters of 6, 4, and 0.9. mm by enhanced glow discharge plasma immersion ion implantation (EGD-PIII) at 10. kV. The acetylene plasma is generated inside the tube by electrons created in the plasma near the substrate and secondary electrons from ion bombardment. Acetylene gas pressure distribution obtained from finite element method shows that the pressure varies linearly from the inlet to the outlet of the tube. The electron mean free path, λe, and collision frequency, νe, are introduced to qualitatively explain the non-uniform DLC film thickness. Raman scattering indicates that the DLC films at different locations have a similar structure.

KW - Diamond-like carbon (DLC)

KW - Enhanced glow discharge plasma immersion ion implantation (EGD-PIII)

KW - Film deposition

KW - Inner surfaces

UR - https://www.scopus.com/pages/publications/84925305312

U2 - 10.1016/j.surfcoat.2014.12.053

DO - 10.1016/j.surfcoat.2014.12.053

M3 - 文章

AN - SCOPUS:84925305312

SN - 0257-8972

VL - 265

SP - 218

EP - 221

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation

Abstract

Keywords

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