Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

Guanqiao Shan; Yingzi Li; Liwen Zhang; Zhenyu Wang; Yingxu Zhang; Jianqiang Qian

doi:10.1063/1.4932580

Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

Guanqiao Shan
, Yingzi Li
, Liwen Zhang
, Zhenyu Wang
, Yingxu Zhang
, Jianqiang Qian

School of Physics

Beihang University

Research output: Contribution to journal › Article › peer-review

45 Scopus citations

Abstract

Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges.

Original language	English
Article number	101501
Journal	Review of Scientific Instruments
Volume	86
Issue number	10
DOIs	https://doi.org/10.1063/1.4932580
State	Published - 1 Oct 2015

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title = "Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges",

abstract = "Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges.",

author = "Guanqiao Shan and Yingzi Li and Liwen Zhang and Zhenyu Wang and Yingxu Zhang and Jianqiang Qian",

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AU - Shan, Guanqiao

AU - Li, Yingzi

AU - Zhang, Liwen

AU - Wang, Zhenyu

AU - Zhang, Yingxu

AU - Qian, Jianqiang

PY - 2015/10/1

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N2 - Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges.

AB - Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges.

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Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

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