Characterization of mechanical properties of cantilevered Nd2Fe14B/Ta magnetic microstructures

The mechanical properties of low-stress cantilevered Nd2Fe14B/Ta multilayered microstructures are characterized. The cantilevered microstructures are fabricated using silicon molding technique and XeF2 gas-phase silicon etching process. The magnetic microcantilevers show relatively high quality factors varying from 75 to 135. The Young's modulus of the Nd2Fe14B/Ta multilayered film is evaluated by fitting the resonance response of the microcantilevers, which is smaller than those of bulk Nd2Fe14B magnets due to the texture effect. The good mechanical properties of the microcantilevers indicate that Nd2Fe14B/Ta multilayered films can be used as a structural material for microsystem applications. In addition, the electromagnetic driving of the Nd2Fe14B/Ta magnetic microcantilever is also demonstrated.