Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output

In order to improve the precision of gyroscope, a silicon Micro-electro-mechanical System (MEMS) gyroscope with Dual-mass Resonant Output (DMRO) was proposed. The resonant output gyroscope consisting of two proof masses with anti-phase and uniform frequency utilized resonant sensing to detect Coriolis force. The transfer function of Coriolis force versus the angular rotational rate were analyzed by a dynamic method and the resonant frequency of the beam subjected to an axial time-varying Coriolis force was described by the Rayleigh-Ritz energy method. By using the Mathieu Equation, the dynamics of a Double-ended Tuning Fork (DETF) resonator and the scale factor of the gyroscope were analyzed. The results of ANSYS simulation show that the resonant frequency of DETF is 4.0431 × 106 Hz and the deviation is 20.7 kPa under applying to pressure of 1 × 106 Pa. The results verify the accuracy of theoretic calculation and show its advantage over single-mass resonant output gyroscope in acceleration effects and vibration noise.