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Bonding Below 150°C Using Nano-Ag Film for Power Electronics Packaging

  • Zhongyang Deng
  • , Guisheng Zou
  • , Hongqiang Zhang
  • , Qiang Jia
  • , Wengan Wang
  • , Ying Wu
  • , A. Zhanwen
  • , Bin Feng
  • , Lei Liu*
  • *Corresponding author for this work
  • Tsinghua University
  • Beijing University of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

Achieving high strength and reliable bonding below 150°C using Ag nanoparticle pastes is still a challenge. This work developed an organic-free nano-Ag multilayer film consisting of a compact layer and a loose layer using pulsed laser deposition (PLD). A high shear strength of 71.2 MPa was achieved with bonding at 150°C, well above the reported values. A value of 18.6 MPa was achieved even with bonding at 50°C, meeting the MIL-STD-883 K standard requirement. The shear strength of sintered joints was strongly dependent on the diffusion behavior and microstructure evolution of loose layers. The sub-10-nanometer grains and high quantity of lattice disorders in the Ag nanoparticles induced a high diffusion driving force, ensuring high-strength bonding inside the bondline. In addition, pre-bonding and nano-bump effects of the deposited compact layer enhanced the interfacial bonding between bondline and metalized surfaces. This work provides a promising method for robust die attachment below 150°C.

Original languageEnglish
Pages (from-to)3903-3913
Number of pages11
JournalJournal of Electronic Materials
Volume52
Issue number6
DOIs
StatePublished - Jun 2023

Keywords

  • Nano-Ag film
  • electronic packaging
  • low-temperature bonding
  • sintering

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