Abstract
Achieving high strength and reliable bonding below 150°C using Ag nanoparticle pastes is still a challenge. This work developed an organic-free nano-Ag multilayer film consisting of a compact layer and a loose layer using pulsed laser deposition (PLD). A high shear strength of 71.2 MPa was achieved with bonding at 150°C, well above the reported values. A value of 18.6 MPa was achieved even with bonding at 50°C, meeting the MIL-STD-883 K standard requirement. The shear strength of sintered joints was strongly dependent on the diffusion behavior and microstructure evolution of loose layers. The sub-10-nanometer grains and high quantity of lattice disorders in the Ag nanoparticles induced a high diffusion driving force, ensuring high-strength bonding inside the bondline. In addition, pre-bonding and nano-bump effects of the deposited compact layer enhanced the interfacial bonding between bondline and metalized surfaces. This work provides a promising method for robust die attachment below 150°C.
| Original language | English |
|---|---|
| Pages (from-to) | 3903-3913 |
| Number of pages | 11 |
| Journal | Journal of Electronic Materials |
| Volume | 52 |
| Issue number | 6 |
| DOIs | |
| State | Published - Jun 2023 |
Keywords
- Nano-Ag film
- electronic packaging
- low-temperature bonding
- sintering
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